A nafion coated capacitive humidity sensor on a flexible PET substrate

by S. Sapsanis, U. Buttner, H. Omran, Y. Belmabkhout, O. Shekhah, M. Eddaoudi, K.N. Salama
Year: 2017 DOI: 10.1109/MWSCAS.2016.7870020

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IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS), Abu Dhabi, UAE


This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert’s fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current effort s in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.



Flexible humidity sensor Nafion PET Capacitive structures Laser engraving