Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

by N. Jaber, S. Ilyas, O. Shekhah, M. Eddaoudi, M. I. Younis
Year: 2018 DOI: https://doi.org/10.1016/j.sna.2018.10.004

Extra Information

Sensors and Actuators A: Physical, Volume 283, 1 November 2018, Pages 254-262

Abstract

Smart sensing systems suffer complexity requiring interface circuits, microcontrollers, switches, and actuators to detect and sense, process the signal and take a decision, and trigger an action upon demand. This increases the device footprint and boosts significantly the power required to actuate the system. Here, we present a hybrid sensor and switch device, which is capable of accurately measuring gas concentration and perform switching when the concentration exceeds specifi (safe) threshold. The device is based on a clamped-clamped microbeam coated with metal-organic frameworks (MOFs). Using the electrostatic harmonic voltage, we employ dynamic multi-modal actuation in which the microbeam is simultaneously excited at the first mode of vibration, near the pull-in band, and at the third mode. We demonstrate experimentally the effectiveness of this technique in measuring the concentration of water vapor and achieving switching when the concentration exceeds a threshold value. In contrast to the first mode operation, we show that monitoring the third mode enhances sensitivity, improves accuracy, and lowers the sensor sensitivity to noise.​
 

Keywords

Smart Sensor Multimode Bifurcation Resonator MOFs Electrostatic